Superconductor layer and method of manufacturing the same

ABSTRACT

There is provided is a method of manufacturing a superconductor layer, including preparing a coating solution by dissolving trifluoroacetates of at least one metal selected from the group consisting of yttrium and lanthanoids, barium, and copper in a solvent, coating a main surface of a substrate with the coating solution to form a coating film, subjecting the coating film to a calcining process in an atmosphere containing oxygen, and subjecting the coating film after the calcining process to a firing process in an atmosphere containing water vapor at a temperature higher than that at the calcining process. The calcining process is carried out such that the coating film after the calcining process and before the firing process have an average CuO particle diameter equal to or less than 25 nm.

CROSS-REFERENCE TO RELATED APPLICATIONS

This is a Continuation Application of PCT Application No.PCT/JP03/02577, filed Mar. 5, 2003, which was not published under PCTArticle 21(2) in English.

This application is based upon and claims the benefit of priority fromprior Japanese Patent Application No. 2002-059398, filed Mar. 5, 2002,the entire contents of which are incorporated herein by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a superconductor layer and a method ofmanufacturing the same, particularly, to a superconductor layercontaining oxide superconductor and a method of manufacturing the same.

2. Description of the Related Art

Oxide superconductors with high critical current density are expected tobe used in, for example, a fusion reactor, a magnetically levitatedtrain, an accelerator and a magnetic resonance imaging (MRI) apparatus,and have already been put to a practical use in some fields. Oxidesuperconductors include, for example, bismuth series oxidesuperconductors and yttrium series oxide superconductors. Particularly,yttrium series oxide superconductors exhibit satisfactorycharacteristics within a magnetic field and, thus, attract keenattentions as a material that is closest to the practical use.

A superconductor layer made of yttrium series superconductor can bemanufactured by, for example, a pulsed laser deposition (PLD) method, aliquid-phase epitaxy (LPE) method, or an electron beam (EB) method. Inrecent years, a metal-organic deposition (MOD) method, which can beperformed in a non-vacuum atmosphere and permits a low manufacturingcost, attracts attention, and vigorous research is being made on the MODmethod mainly in the United States of America. Particularly, goodproperties are repeatedly reported in respect of the MOD method using afluoroacetate such as trifluoroacetate (TFA), which is hereinafterreferred to as TFA-MOD method.

According to the TFA-MOD method, a superconductor layer is formed by thefollowing manner. First, trifluoroacetates of metals that constitute thesuperconductor are prepared by using trifluoroacetate and aqueoussolutions of metal acetates, followed by dissolving the trifluoroacetateof metals in an organic solvent to obtain a coating solution. Then, asubstrate is coated with the coating solution to obtain a coating film,and the coating film thus obtained is subjected to a calcining processin a humidified oxygen atmosphere so as to form a precursor thatcontains elements to be used as constituents of oxide superconductor.Further, the coating film is subjected to a firing process in ahumidified atmosphere so as to bring about crystallization of theprecursor. In other words, crystals of oxide superconductor are allowedto grow on the substrate. Thereafter, an annealing in an oxygenatmosphere is performed. A superconductor layer is formed by the processdescribed above.

According to the method described above, it is possible to easily obtaina superconductor layer exhibiting a high critical current density J_(c).However, the present inventors are of the opinion that the TFA-MODmethod is capable of achieving a still higher critical current densityJ_(c).

BRIEF SUMMARY OF THE INVENTION

An object of the present invention, which has been achieved in view ofthe problems pointed out above, is to make it possible to manufacture asuperconductor layer with higher critical current density by the TFA-MODmethod.

According to a first aspect of the present invention, there is provideda superconductor layer formed on a main surface of a substrate,comprising an oxide superconductor that contains at least one metalselected from the group consisting of yttrium and lanthanoids, barium,copper and oxygen, wherein, when a cross section of the superconductorlayer that is parallel with the main surface and spaced apart from themain surface by 50 nm to 70% of a thickness of the superconductor layeris observed, an area ratio of copper oxide particles to thesuperconductor layer is 1/100 or less.

According to a second aspect of the present invention, there is provideda method of manufacturing a superconductor layer, comprising preparing acoating solution by dissolving trifluoroacetates of at least one metalselected from the group consisting of yttrium and lanthanoids, barium,and copper in a solvent, coating a main surface of a substrate with thecoating solution to form a coating film, subjecting the coating film toa calcining process in an atmosphere containing oxygen, and subjectingthe coating film after the calcining process to a firing process in anatmosphere containing water vapor at a temperature higher than that atthe calcining process, wherein the calcining process is carried out suchthat the coating film after the calcining process and before the firingprocess have an average CuO particle diameter equal to or less than 25nm.

According to a third aspect of the present invention, there is provideda method of manufacturing a superconductor layer, comprising preparing acoating solution by dissolving trifluoroacetates of at least one metalselected from the group consisting of yttrium and lanthanoids, barium,and copper in a solvent, coating a main surface of a substrate with thecoating solution to form a coating film, subjecting the coating film toa calcining process in an atmosphere containing oxygen, and subjectingthe coating film after the calcining process to a firing process in anatmosphere containing water vapor at a temperature higher than that atthe calcining process, wherein the calcining process includes elevatinga temperature of the coating film in an atmosphere of the atmosphericpressure containing water vapor such that a maximum temperature that thecoating film reaches is 400° C. or higher, and that, during thetemperature elevation, a period that. the temperature of the coatingfilm is kept at 200° C. to 250° C. falls within a range of 6 hours and15 minutes to 16 hours and 30 minutes.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWING

FIG. 1 is a flow chart showing the manufacturing process of asuperconductor layer according to an embodiment of the presentinvention;

FIGS. 2A to 2C schematically show the reaction during the firing processincluded in the manufacturing process of a superconductor layeraccording to an embodiment of the present invention;

FIGS. 3A to 3C schematically-show the reaction during the firing processincluded in the conventional manufacturing process of a superconductorlayer;

FIG. 4 is a graph showing the temperature profile of the calciningprocess carried out in Example 1;

FIG. 5 is a graph showing the temperature profile of the firing processand the annealing carried out in Example 1;

FIG. 6 is a cross sectional TEM micrograph showing a superconductorlayer which was calcined at 200° C. to 250° C. for 16 hours and 40minutes;

FIG. 7 is a cross sectional TEM micrograph showing a superconductorlayer which was calcined at 200° C. to 250° C. for 66 hours and 40minutes;

FIG. 8 is a graph showing the relationship between the calciningcondition and Jc of the superconductor layers obtained in example 1;

FIG. 9 is a TEM micrograph showing a superconductor layer which wascalcined at 200° C. to 250° C. for 66 hours and 40 minutes; and

FIG. 10 is a graph showing the relationship between the amount of CuOparticles present in the superconductor layer and the critical currentdensity J_(c).

DETAILED DESCRIPTION OF THE INVENTION

Embodiments of the present invention will now be described withreference to the accompanying drawings.

FIG. 1 is a flow chart showing the manufacturing process of asuperconductor layer according to an embodiment of the presentinvention. In the present embodiment, the superconductor layer ismanufactured by the method described below.

First, acetate of yttrium and/or lanthanoids, barium acetate and copperacetate are prepared. Then, each of these acetates is dissolved in waterso as to obtain aqueous solutions of acetates. Further, trifluoroacetateis mixed with each aqueous solution of acetate in a mixing ratiosubstantially corresponding to the stoichiometric ratio, e.g., within anerror range of ±5% relative to the stoichiometric ratio, followed byfurther mixing the aqueous solutions of acetates such that a molar ratioof yttrium and/or lanthanoids, barium and copper is adjusted to 1:2:3 orso. Then, an ion exchange between the acetate ions and thetrifluoroacetate ions is promoted within the mixed solution. Further,the trifluoroacetate, which is obtained as a result of the ion exchangereaction, is refined.

Next, the refined trifluoroacetate is dissolved in a suitable solvent toprepare a coating solution, followed by coating a substrate with thecoating solution to obtain a coating film.

The coating film thus obtained is calcined in an atmosphere containingwater vapor and oxygen, preferably, in a humidified pure oxygenatmosphere. In the calcining process, a decomposition reaction such asthe hydrolysis of the trifluoroacetate is brought about so as to permitthe decomposition products containing the constituent elements of thetrifluoroacetate to evaporate from the coating film. At the same time,oxygen is supplied into the coating film to generate a precursor ofoxide superconductor. Incidentally, in the case of using a highlypurified solution, it is possible to decompose trifluoroacetate withoutsublimation of Cu(TFA)₂ even if the reaction system is not humidified,as disclosed in T. Araki, Cryogenics 41, 675 (2001). Also, the precursorobtained by the calcining process is mainly made of an amorphous matrixcontaining the constituent elements of oxide superconductor and CuOmicrocrystals (or CuO particles) distributed therein.

After the calcining process, the coating film is subjected to the firingprocess in an atmosphere containing water vapor, preferably in an inertgas atmosphere containing water vapor and a trace of oxygen, followed byannealing the coating film in an oxygen atmosphere. In the firingprocess, the precursor prepared by the calcining process is crystallizedto form an oxide superconductor, thereby obtaining a superconductorlayer.

In the present embodiment, the calcining process is carried out suchthat CuO in the calcined film has an average particle diameter notlarger than a prescribed value. The particular method makes it possibleto achieve a high critical current density, as described in thefollowing.

Cu(TFA)₂ used in the TFA-MOD method sublimes when heated to a hightemperature. Therefore, in the method, the calcining process at arelatively low temperature in a humidified oxygen atmosphere is carriedout prior to the firing process so as to suppress the sublimationreferred to above. Incidentally, in the calcining process, Cu(TFA)₂ ispartial-hydrolyzed so as to be converted into Cu(TFA)OH and, then,further decomposed into CuO, as described in McIntryre, et al., Proc.Mat. Res. Soc. Symp. 169. 743 (1990). Also, the other trifluoroacetatesare decomposed at temperatures higher than the decomposition temperatureof Cu(TFA)₂. Therefore, the precursor formed by the calcining process ismainly made of the amorphous matrix containing the metal, O and F, andCuO microcrystals (or CuO particles) distributed therein, as disclosedin T. Araki, et al., Supercond. Sci. Technol. 14, 783. (2001).

The present inventors have found that the critical current density J_(c)is affected by CuO microcrystals produced within the precursor and theimpurities contained in the precursor. It is possible to eliminate theinfluences of the impurities on the critical current density J_(c) byincreasing the purity of the solutions noted above, as disclosed in T.Araki, et al., Supercond. Sci. Technol. 14, L21 (2001). However, the CuOmicrocrystals are produced as a result of the hydrolysis and oxidationof Cu(TFA)₂ as described above. Suppression of the influences by the CuOmicrocrystals is particularly important to improve the critical currentdensity J_(c).

As described above, the calcined film is mainly made of the amorphousmatrix containing the constituent elements of oxide superconductor andCuO particles. distributed therein. The present inventors believe thatthe precursor containing the amorphous matrix and the CuO particles isconverted during the firing process into oxide superconductor throughthe quasi-liquid phase. Also, previous researches demonstrate that watervapor is necessary for producing the quasi-liquid phase, thequasi-liquid phase releases hydrogen fluoride when converted into oxidesuperconductor, and the reaction to produce oxide superconductor fromthe precursor is reversible. Therefore, the reaction to form oxidesuperconductor from the precursor is presumed as follows:CuO+Amorphous matrix (Y, Ba, O, F)+H₂O⇄Quasi-liquid phase⇄YBCO+HF↑

The reaction formula given above indicates that, if the H₂O content ofthe atmosphere is increased without changing temperature, the copperconstituting the CuO particles in the precursor can be used for theformation of the quasi-liquid phase. Therefore, it is possible todecrease the amount of the CuO particles. In other words, it is possibleto decrease the amount of the microcrystals in the superconductor layerso as to realize a high critical current density J_(c). However, it ispractically impossible to markedly increase the critical current densityJ_(c) by simply increasing the amount of humidity during the firingprocess.

The present inventors considered that the diameter of the CuO particleswithin the precursor is important for the property, established firstthe control method of the particle diameter of the CuO particles withinthe precursor, and investigated the relationship between the particlediameter of the CuO particles and the critical current density J_(c) Asa result, it has been confirmed that, where the average diameter of theCuO particles within the precursor is set at 25 nm or less, it ispossible to realize a high critical current density J_(c) if the firingprocess is carried out in a sufficiently humidified atmosphere.

FIGS. 2A to 2C schematically show the reaction during the firing processincluded in the manufacturing process of the superconductor layeraccording to an embodiment of the present invention. Also, FIGS. 3A to3C schematically show the reaction during the firing process included inthe conventional manufacturing process of the superconductor layer.Incidentally, each of FIGS. 2A and 3A shows the calcined coating film.Each of FIGS. 2B and 3B shows the coating film during the firingprocess. Further, each of FIGS. 2C and 3C shows the superconductor layerobtained after the firing process.

As shown in FIGS. 2A and 3A, the calcined coating film (precursor) 2 ona substrate 1 is mainly made of an amorphous matrix 3 and CuO particles4.

As shown in FIG. 3A, the CuO particles 4 in the calcined coating film 2have a large average diameter and a small specific surface area.Therefore, it is difficult to convert whole the CuO particle into thequasi-liquid phase 5 during the firing process, as shown in FIG. 3B.Consequently, a large amount of CuO particles 4 having a large averageparticle diameter remain in a superconductor layer 7 together with anoxide superconductor 6, as shown in FIG. 3C, resulting in poor criticalcurrent density J_(c).

On the other hand, the CuO particles 4 in the calcined coating film 2have a small average particle diameter and a large specific surfacearea. Therefore, it is possible to covert almost all the CuO particlesinto the quasi-liquid phase 5, as shown in FIG. 2B. Consequently, it ispossible to prevent the CuO particles 4 from remaining within thesuperconductor layer 7 as shown in FIG. 2C so as to be able to realize ahigh critical current density J_(c).

In the present embodiment, the calcining-process is carried out suchthat the CuO particles within the precursor have an average diameter of25 nm or less, as described previously. If the CuO particles within theprecursor have a smaller average particle diameter, the CuO particlescan be converted more easily into the quasi-liquid phase 5 during thefiring process. However, where the calcining process is carried outunder the condition which makes the average particle diameter of the CuOparticles very small, it is difficult in some cases to sufficientlydecompose the trifluoroacetate. In such cases, in order to sufficientlydecompose the trifluoroacetate, the calcining process may be carried outsuch that the CuO particles within the precursor have an averagediameter of 8.8 nm or larger.

In the present embodiment, at least one kind of the metal selected fromthe group including yttrium and lanthanoids, barium and copper arecontained in the oxide superconductor 6. Any kind of lanthanoid metalcan be used. However, in view of facilitating the preparation of theacetate solution and the trifluoroacetate solution, it is advantageousto use at least one kind of metal selected from the group includingsamarium, europium, gadolinium, terbium, dysprosium, holmium, erbium,and thulium.

In the present embodiment, it is desirable to carry out the firingprocess in an atmosphere containing water vapor in an amount of at least4.2% by volume. More desirably, the firing process should be carried outin an atmosphere containing at least 12.1% by volume of water vapor.Also, it is possible to carry out the firing process in an atmospherecontaining at least 31.2% by volume of water vapor. The effect ofpromoting the formation of the quasi-liquid phase 5 is improved byincreasing the humidifying amount in the firing process.

In the present embodiment, it is desirable to use the trifluoroacetatehaving the impurity content not higher than 6% by-mass. In the case ofusing a coating solution containing a large amount of acetates such asbarium acetate or yttrium acetate as the impurities, it is possible forparticles of oxides of Y or Ba to be formed within the superconductorlayer 7.

In the present embodiment, it is desirable for the solvent used forpreparation of the coating solution to contain at least one of methanoland ethanol in an amount of at least 50% by mass. In the case of usingsuch a solvent, it is possible to permit the solvent to be evaporatedpromptly from the coated film.

In the present embodiment, when the calcining process is carried out inan atmosphere of the atmospheric pressure containing water vapor, it isdesirable that the period during which the coating film is kept at 200°C. to 250° C. in the stage of elevating the temperature of the coatingfilm falls within a range of 6 hours and 15 minutes to 16 hours and 30minutes. In this case, it is possible for the decomposition reaction oftrifluoroacetate to sufficiently proceed, and it is possible tosufficiently suppress the growth of the CuO particles. It is alsodesirable for the highest temperature during the calcining process toreach about 300 to 500° C., more preferably, 400° C. or higher. In thiscase, it is possible for the decomposition products of trifluoroacetateto promptly evaporate from the coating film, which is advantageous insuppressing the growth of the CuO particles.

In the present embodiment, it is desirable for the highest temperatureduring the firing process to be not lower than 725° C. In this case, itis possible for the crystal growth to satisfactorily proceed. Althoughthe highest temperature during the firing process is not particularlylimited, the highest temperature should be generally about 850° C. to900° C. at which the deterioration of the substrate can be sufficientlyprevented.

In the present embodiment, it is desirable for the oxygen annealingtreatment to be carried out at a temperature of 525° C. or lower.Incidentally, the oxygen annealing treatment can be carried outconsecutively to the firing process by switching the atmosphere.

As described above, according to the method of this embodiment, it ispossible to obtain the superconductor layer 7 exhibiting a high criticalcurrent density. The superconductor layer 7 can be used in variousfields including, for example, a superconducting wire, a superconductingcoil, a superconducting magnet, an MRI apparatus, a magneticallylevitated train, and SMES. The superconductor layer 7 thus obtainedexhibits features markedly differing from those exhibited by thesuperconductor layer obtained by the conventional method as described inthe following.

In the superconductor layer 7 obtained by any of the method shown inFIGS. 2A to 2C and the method shown in FIGS. 3A to 3C, the crystalgrowth satisfactorily proceeds in the region about 50 nm or less fromthe surface of the substrate 1, and microcrystals such as CuO particles4 are scarcely present in the particular region.

It should also be noted that, if the CuO particles 4 are taken into theoxide superconductor 6 during the process of the crystal growth of theoxide superconductor 6 in not only the method shown in FIGS. 3A to 3Cbut also the method shown in FIGS. 2A to 2C, the composition of theprecursor 2 shown in FIGS. 2B and 3B is deviated from the stoichiometry.Where a sufficiently large amount of the quasi-liquid phase 5 is presentin the edge portion of the growth of the oxide superconductor 6, thecrystal growth of the oxide superconductor 6 satisfactorily proceeds.However, where the amount of the precursor 2 is deficient, the deviationof the composition from the stoichiometry is rendered large so as tomake it impossible to form the quasi-liquid phase. As a result, metalsother than Cu and compounds of these metals are precipitated. Accordingto the method of the present embodiment, the particular precipitation issmall at positions of the superconductor layer where the distance fromthe surface of the substrate 1 is 70% or less of the thickness of thesuperconductor layer 7.

If at least one of the cross sections of the superconductor layers 7that is parallel with the substrate 1 and spaced apart from thesubstrate 1 by 50 nm to 70% of the thickness of the superconductor layer7 is observed by, for example, a transmission electron microscope (TEM),it is clearly seen that the superconductor layer 7 obtained by themethod of the present embodiment markedly differs from thesuperconductor layer obtained by the conventional method in the contentof fine particles. To be more specific, in the superconductor layerobtained by the conventional method, the area ratio of the cross sectionof the fine particles to the cross section noted above is 1/50 or more.On the other hand, in the superconductor layer 7 obtained by the methodaccording to the present embodiment, the area ratio of the cross sectionof the fine particles to the cross section noted above is 1/100 or less,and 1/1000 or less in the case where a particularly large criticalcurrent density can be obtained. Because of the particular feature, itis possible to judge whether or not the superconductor layer wasmanufactured by the method according to this embodiment. Incidentally,where the calcining process is carried out by the method according tothe present embodiment such that the CuO particles within the precursorhave an average diameter of 8.8 nm or larger, it is possible for thearea ratio noted above to be 1/1000 or more depending on, for example,the conditions of the firing process.

The superconductor layer obtained by the method according to the presentembodiment is featured as follows. Since the TFA-MOD method is utilizedin this embodiment, the superconductor layer obtained by the methoddescribed above contains a trace of fluorine. In addition, where thesuperconductor layer obtained by the method of this embodiment containscopper oxide particles, oxide superconductor is present in an amount ofat least 50% by volume in a region which surrounds the copper oxideparticle and whose outer surface is away from a surface of the copperoxide particle by 0.1 μm.

It is possible to judge whether or not the superconductor layer wasobtained by the method according to the present embodiment by lookinginto, for example, the features described above.

Examples of the present invention will now be described.

EXAMPLE 1

Each powder of hydrated Y(OCOCH₃)₃, Ba(OCOCH₃)₂ and hydrated Cu(OCOCH₃)₂was dissolved in deionized water. Then, an equivalent molar of CF₃COOHwas added to each of the resultant solutions while stirring thesolution, followed by mixing these solutions in the metal ion molarratio of 1:2:3 so as to obtain a mixed solution. The mixed solution waspoured into an eggplant type flask and the flask was set on a rotaryevaporator so as to carry out the reaction and refining under a reducedpressure for 12 hours. As a result, a translucent blue gel or sol wasobtained.

The gel or sol thus obtained was completely dissolved in methanol in anamount about 100 times as heavy as the gel or sol. The solution thusprepared was also subjected to the reaction and refining for 12 hoursunder a reduced pressure by using a rotary evaporator, thereby obtaininga translucent blue gel or sol. The gel or sol thus prepared wasdissolved again in methanol, followed by diluting the resultant solutionby using a measuring flask so as to obtain a coating solution with aconcentration of 1.52M in metal ions.

Then, the (100) oriented LaAlO₃ substrate was coated with the coatingsolution by means of the spin coating. In performing the spin coatingoperation, the accelerating time was set at 0.4 second, the rotatingspeed was set at 4,000 rpm, and the rotation was kept for 120 seconds.

Next, a calcining process was applied under the atmospheric pressure tothe coating film obtained by the spin coating operation. Then, a firingprocess was applied under the atmospheric pressure to the calcinedcoating film, followed by applying an annealing treatment to the firedcoating film so as to obtain a superconductor layer.

FIG. 4 is a graph showing the temperature profile of the calciningprocess. In the graph of FIG. 4, the elapsed time from initiation of theheating is plotted on the abscissa, and the temperature of theatmosphere is plotted on the ordinate. In Example 1, the calciningprocess was carried out in a pure oxygen atmosphere for 7 minutes afterinitiation of the heating and, then, the calcining process was carriedout in a humidified pure oxygen atmosphere containing 4.2% by volume ofwater vapor until the highest temperature of 400° C. was reached. Also,in Example 1, the time for elevating the temperature from 200° C. to250° C. in the calcining process was changed within a range of 4 hoursand 10 minutes to 66 hours and 40 minutes.

FIG. 5 is a graph showing the temperature profile of the firing processand the annealing treatment carried out in Example 1. In the graph ofFIG. 5, the elapsed time from initiation of the heating is plotted onthe abscissa, and the temperature of the atmosphere is plotted on theordinate. In this Example, the firing process and the annealingtreatment were carried out in a dry atmosphere of argon containing 1000ppm of oxygen in the initial stage of the heating. Then, the atmospherewas humidified at a rate of 4.2% by volume, followed by changing theatmosphere into a dry oxygen atmosphere.

In respect of each of the superconductor layers thus obtained, crosssections of the superconductor layer within a range between 50 nm and100 nm from the surface of the substrate and parallel with the surfaceof the substrate was observed with a TEM. Also, a cross section of thesuperconductor layer perpendicular to the substrate was observed with aTEM in respect of the coating film after the calcining process andbefore the firing process. Further, in respect of each of thesuperconductor layers, Ic was measured by a DC four-probe method, andthe thickness of the film was measured from the inductively coupledplasma (IPC) emission spectroscopy and the area of the sample piece.

FIG. 6 is a cross sectional TEM micrograph showing a superconductorlayer which was calcined at 200° C. to 250° C. for 16 hours and 40minutes. On the other hand, FIG. 7 is a cross sectional TEM micrographshowing a superconductor layer which was calcined at 200° C. to 250° C.for 66 hours and 40 minutes. CuO particles were observed in the firedcoating film in each of these TEM micrographs. Also, it was confirmedfrom the EDS analysis of TEM that the other portion is made of anamorphous matrix mainly containing Y, Ba, O and F and partiallycontaining the Cu content. Incidentally, particles other than the CuOparticles were not recognized in the calcined coating films. The reasonfor this is that the impurities were eliminated by highly purifying thesolution.

The average diameters of the CuO particles and the standard deviationsthereof, which were obtained from the TEM micrographs shown in FIGS. 6and 7, are shown in the table given below: CuO particle CalciningStandard condition Average deviation (Duration at particle for particle200° C. to 250° C.) diameter (nm) diameter (nm) 16 hr 40 min 14.0 1.3366 hr 40 min 23.7 6.56

As described above, it is presumed that copper trifuluoroacetate startspartial-hydrolysis and oxidation thereof, which produce CuO, prior tothe other salts start partial-hydrolysis and oxidation thereof, and thelatter salts produce the amorphous matrix. Within the temperature rangeof 200° C. to 250° C. during the calcining process, the CuO particlesare considered to continue to grow with the reduction of the surfaceenergy utilized as the driving force. In other words, the growth of theCuO particles is considered to obey the Ostwald's growth or the growingmechanism close thereto. The experimental data indicated in the tablegiven above represent the result well conforming with the Ostwald'sgrowth. It follows that the particle diameter of the CuO particle isconsidered to monotonically increase in accordance with the time duringwhich the temperature of the atmosphere is kept at 200° C. to 250° C. inthe calcining process.

FIG. 8 is a graph showing the relationship between the calciningcondition and the critical current density J_(c) of the superconductorlayer obtained in Example 1. In the graph of FIG. 8, the time duringwhich the temperature of the atmosphere was kept at 200° C. to 250° C.in the calcining process is plotted on the abscissa, and the criticalcurrent density J_(c) is plotted on the ordinate. Also, a referencenumeral 11 shown in FIG. 8 denotes the data obtained in Example 1, and areference numeral 12 denotes the data obtained in Example 2 describedherein later.

As denoted by the reference numeral 11 in FIG. 8, a high criticalcurrent density J_(c) was obtained in the case where the time duringwhich the temperature of the atmosphere was kept at 200° C. to 250° C.in the calcining process was set within a range of 6 hours and 15minutes to 16 hours and 30 minutes. The reason for this is that thedecomposition of the trifluoroacetate sufficiently progressed and thegrowth of the CuO particles was sufficiently suppressed.

FIG. 9 is a TEM micrograph showing a superconductor layer which was keptat 200° C. to 250° C. for 66 hours and 40 minutes in the calciningprocess. The TEM micrograph shows a cross section having the smallestnumber of CuO particles among the cross sections of the superconductorlayer that are spaced apart from the substrate by 50 nm to 100 nm andare parallel with the substrate surface. The area ratio of the CuOparticles to the superconductor layer was about 1/200 in the crosssection shown in FIG. 9 and fell within a range of 1/50 to 1/200 in theother cross sections.

Similarly examined was the TEM micrograph of the superconductor layerkept at 200° C. to 250° C. for 16 hours and 40 minutes during thecalcining process. The area ratio noted above was found to fall within arange of 1/80 to 1/400. Also, the area ratio of the CuO particles to thesuperconductor layer was found to be 1/100 or less in all the crosssections in the case where the superconductor layer was kept at 200° C.to 250° C. for 13 hours and 43 minutes in the calcining process.Further, the area ratio noted above was 1/1000 or less in all the crosssections in the case where the superconductor layer was kept at thetemperature noted above for 9 hours and 43 minutes. In the case of usinga LaAlO₃ single crystal substrate, it was possible to obtain a criticalcurrent density of 7 to 8 MA/cm² (77K, 0 T). Also, in the case of usinga CeO₂/YSZ substrate free from the generation problem of particlesoriented in the a/b axis, it was possible to obtain a critical currentdensity J_(c) of 10 to 12 MA/cm² (77K, 0 T). Incidentally, thesuperconductor layers had a thickness of 150 to 320 nm.

FIG. 10 is a graph showing the relationship between the amount of theCuO particles present in the superconductor layer and the criticalcurrent density J_(c). In the graph of FIG. 10, plotted on the abscissais the area ratio of the CuO particles to the superconductor layer in across section of the superconductor layer that is spaced apart from thesubstrate by 50 nm to 100 nm and is parallel with the substrate surface,and the critical current density J_(c) is plotted on the ordinate. Areference numeral 13 shown in FIG. 10 denotes the data obtained in thecase of using the LaAlO₃ substrate, and a reference numeral 14 denotesthe data obtained in the case of using the CeO₂/YSZ substrate. As shownin FIG. 10, the superconductor layer having the above-noted area ratioof 1/100 or less exhibited good properties, and the superconductor layerhaving the area ratio of 1/1000 or less exhibited superior properties.

EXAMPLE 2

A superconductor layer having a thickness of 150 nm was formed as inExample 1, except that the atmosphere was kept at 200° C. to 250° C. for66 hours and 40 minutes in the calcining process, and that the watervapor content of the humidified Ar/O₂ atmosphere in the firing processwas set at 12.1% by volume. Cross sections of the superconductor layerthat are spaced apart from the substrate by 50 nm to 100 nm and parallelwith the substrate surface were observed with a TEM. As a result, thearea ratio of the CuO particles to the superconductor layer was 1/60 to1/250 in these cross sections.

Also, the critical current density J_(c) was measured for thissuperconductor layer, with the result as shown in FIG. 8. As denoted bya reference numeral 12 in FIG. 8, it was possible to obtain a highercritical current density J_(c), compared with the case where thesuperconductor layer was formed under the same conditions, except thatthe water vapor concentration in the humidified Ar/O₂ atmosphere in thefiring process was set at 4.2% by volume.

The technique described above carries out the calcining process of theTFA-MOD method such that the average diameter of the copper oxideparticles contained in the calcined coating film falls within aprescribed range. In this case, the CuO particles can be sufficientlyconverted into the superconductor by carrying out the firing process ina sufficiently humidified atmosphere so as to realize a high criticalcurrent density. In other words, it becomes possible to manufacture asuperconductor layer with high critical current density by the TFA-MODmethod.

Additional advantages and modifications will readily occur to thoseskilled in the art. Therefore, the invention in its broader aspects isnot limited to the specific details and representative embodiments shownand described herein. Accordingly, various modifications may be madewithout departing from the spirit or scope of the general inventionconcept as defined by the appended claims and their equivalents.

1-8. (canceled)
 9. A method of manufacturing a superconductor layer,comprising: preparing a coating solution by dissolving trifluoroacettesof at least one metal selected from the group consisting of yttrium andlanthanoids, barium, and copper in a solvent; coating a main surface ofa substrate with the coating solution to form a coating film; subjectingthe coating film to a calcining process in an atmosphere containingoxygen; and subjecting the coating film after the calcining process to afiring process in an atmosphere containing water vapor at a temperaturehigher than that at the calcining process, wherein the calcining processis carried out such that the coating film after the calcining processand before the firing process have an average CuO particle diameterequal to or less than 25 nm.
 10. A method of manufacturing asuperconductor layer, comprising: preparing a coating solution bydissolving trifluoroacetates of at least one metal selected from thegroup consisting of yttrium and lanthanoids, barium, and copper in asolvent; coating a main surface of a substrate with the coating solutionto form a coating film; subjecting the coating film to a calciningprocess in an atmosphere containing oxygen; and subjecting the coatingfilm after the calcining process to a firing process in an atmospherecontaining water vapor at a temperature higher than that at thecalcining process, wherein the calcining process includes elevating atemperature of the coating film in an atmosphere of the atmosphericpressure containing water vapor such that a maximum temperature that thecoating film reaches is 400° C. or higher, and that, during thetemperature elevation, a period that the temperature of the coating filmis kept at 200° C. to 250° C. falls within a range of 6 hours and 15minutes to 16 hours and 30 minutes.
 11. The method of manufacturing asuperconductor layer according to claim 9, wherein the firing process iscarried out in an atmosphere containing water vapor in an amount of atleast 4.2% by volume.
 12. The method of manufacturing a superconductorlayer according to claim 10, wherein the firing process is carried outin an atmosphere containing water vapor in an amount of at least 4.2% byvolume.
 13. The method of manufacturing a superconductor layer accordingto claim 9, wherein the trifluoracetates used contain impurities in anamount equal to or less than 6% by mass.
 14. The method of manufacturinga superconductor layer according to claim 10, wherein thetrifluoracetates used contain impurities in an amount equal to or lessthan 6% by mass.
 15. The method of manufacturing a superconductor layeraccording to claim 9, wherein the solvent contains at least one ofmethanol and ethanol in an amount of at least 50% by mass.
 16. Themethod of manufacturing a superconductor layer according to claim 10,wherein the solvent contains at least one of methanol and ethanol in anamount of at least 50% by mass.
 17. The method of manufacturing asuperconductor layer according to claim 9, wherein a maximum temperatureof the coating film that is reached during the firing process is 725° C.or higher.
 18. The method of manufacturing a superconductor layeraccording to claim 10, wherein a maximum temperature of the coating filmthat is reaching during the firing process is 725° C. or higher.